Characterization of anodic SiO2 films on P-type 4H-SiC

Abstract

The physical and electronic properties of 100–120-nm thick anodic silicon dioxide film grown on p-type 4H-SiC wafer and annealed at different temperatures (500, 600, 700, and 800 °C) have been investigated and reported. Chemical bonding of the films has been analyzed by Fourier transform infra red spectroscopy. Smooth and defect-free film surface has been revealed under field emission scanning electron microscope. Atomic force microscope has been used to study topography and surface roughness of the films. Electronic properties of the film have been investigated by high frequency capacitance–voltage and current–voltage measurements. As the annealing temperature increased, refractive index, dielectric constant, film density, SiC surface roughness, effective oxide charge, and leakage current density have been reduced until 700 °C. An increment of these parameters has been observed after this temperature. However, a reversed trend has been demonstrated in porosity of the film and barrier height between conduction band edge of SiO₂ and SiC.

Keyword

• Anodic oxidation;
• Atomic force microscope;
• Annealing;
• Silicon carbide

Thin Solid Films

Volume 517, Issue 8, 27 February 2009, Pages 2808–2812