AFM Lithography

nAn atomic force microscope (AFM) lithography is a reliable method to fabricate nanostructures.

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One of the most methods is local anodic oxidation (LAO) by AFM

qwhere the application of a positive voltage to the surface with respect to the tip

qin humidity atmosphere.

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By controlling the certain condition between the AFM tip and the sample, desired nanopatterns can be created.